GRAYSCALE LITHOGRAPHY TO FABRICATE VARYING-DEPTH NANOCHANNELS IN A SINGLE STEP - LAAS-Micro Nano Bio Technologies Accéder directement au contenu
Communication Dans Un Congrès Année : 2016

GRAYSCALE LITHOGRAPHY TO FABRICATE VARYING-DEPTH NANOCHANNELS IN A SINGLE STEP

Résumé

We report a new, fast and versatile method to fabricate nanochannels with non-uniform depth in a single step, in the range 50-500nm. The process is based on maskless laser lithography to structure a photosensitive resist (PR). The lateral dimension can be as small as 2µm. Functional nanofluidic chips with slopes, steps, and pore networks mimicking a nanoporous medium were fabricated and tested.
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Dates et versions

hal-01391501 , version 1 (07-11-2016)

Identifiants

  • HAL Id : hal-01391501 , version 1

Citer

Antoine Naillon, Hajar Massadi, Rémi Courson, Pierre-François Calmon, Lucie Seveno, et al.. GRAYSCALE LITHOGRAPHY TO FABRICATE VARYING-DEPTH NANOCHANNELS IN A SINGLE STEP. The 20th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS, CBMS, Oct 2016, Dublin, Ireland. ⟨hal-01391501⟩
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