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Communication Dans Un Congrès Année : 2001

A New Generation of SnO2 gas sensor for agro-industrial applications

Philippe Menini
Laurent Erades
  • Fonction : Auteur
M. Guerrero
  • Fonction : Auteur
Bruno Chaudret
A. Martinez
  • Fonction : Auteur

Résumé

A new generation of gas sensor which consists of a silicon platform with an integrated polysilicon resistor as heater and a nanoparticular SnO2 sensitive layer has been developed and characterized. Methods of deposition and oxidation of the sensitive layer on the substrate were first optimized. Then, a demonstrator was implemented to evaluate the sensor's electrical behaviour under controlled atmospheric conditions. An electrical circuit has been developed to model the electrical behaviour of the sensor. Comparisons between PSPICE simulations and experimental data shows close agreement.
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Dates et versions

hal-02160612 , version 1 (19-06-2019)

Identifiants

  • HAL Id : hal-02160612 , version 1

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Philippe Menini, S Cornibert, André Maisonnat, Laurent Erades, M. Guerrero, et al.. A New Generation of SnO2 gas sensor for agro-industrial applications. 3rd European Conference on Odours metrology and Electronic Noses (Eurodeur-Airodeur), Jun 2001, Paris, France. ⟨hal-02160612⟩
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