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hal-00711131v1  Conference papers
Anthony CoustouDavid DubucKatia GrenierErwan FournOlivier Llopis et al.  Capabilities of a 10 GHz MEMS based VCO
1st European Microwave Integrated Circuits Conference, Oct 2006, Manchester, United Kingdom. pp.157-160
hal-01736073v1  Journal articles
S. BoninelliNikolay CherkashinAlain ClaverieFuccio Cristiano. Transformation of {1 1 3} defects into dislocation loops mediated by the {1 1 1} rod-like defects
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2006, 253 (1-2), pp.80-84. ⟨10.1016/j.nimb.2006.10.019⟩
hal-01736079v1  Journal articles
Fuccio CristianoY. LamraniF. SeveracM. GavelleS. Boninelli et al.  Defects evolution and dopant activation anomalies in ion implanted silicon
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2006, 253 (1-2), pp.68-79. ⟨10.1016/j.nimb.2006.10.046⟩
hal-01228741v1  Conference papers
Liviu NicuThomas AlavaFabrice MathieuCédric AyelaCaroline Soyer et al.  Actuation and sensing integration challenges at the microscale: the Gordian Knot of the resonant BioMEMS realm
2010 IEEE International Frequency Control Symposium, 2010, San Francisco, United States
hal-00865906v1  Conference papers
Liviu NicuThomas AlavaThierry LeichleDaisuke SayaJean Bernard Pourciel et al.  Integrative technology-based approach of MEMS for biological applications
IEEE International Solid-State Circuits Conference, 2010, San Francisco, United States. 12 p
hal-02161148v1  Conference papers
Jean-Marie DucereAnne HémeryckAlain EstèveMehdi Djafari RouhaniGeorges Landa et al.  CO and CO2 detection by SnO2: a DFT study
E-MRS Conference, Jun 2009, Strasbourg, France
hal-03179355v1  Conference papers
Olivier ThomasLiviu NicuCédric AyelaCyril Touzé. Buckling and non-linear vibrations of a MEMS biosensor
Sixth EUROMECH Nonlinear Dynamics Conference, ENOC 2008, Jun 2008, Saint Petersburg, Russia
hal-01736089v1  Journal articles
W. LerchS. PaulJ. NiessFuccio CristianoY. Lamrani et al.  Deactivation of Solid Phase Epitaxy-Activated Boron Ultrashallow Junctions
Journal of The Electrochemical Society, 2005, 152 (10), pp.G787. ⟨10.1149/1.2018176⟩