Optical and structural investigations of annealing impact on phase separation of Erbium-doped Al2O3 layers
Résumé
We report on the effect of annealing treatment on the structural and optical properties of Er-doped Al 2 O 3 thin films elaborated by atomic layer deposition. The properties of the films were studied using ellipsometry and Fourier-transform infrared (FTIR) spectroscopies, cathodoluminescence (CL) versus annealing temperature varied in the 650-1100 • C range. Spatial location and diffusion of chemical species were investigated at the atomic scale by atom probe tomography (APT). The CL measurements evidence Er 3+ light emission over the visible-infrared spectral range. The CL spectra evolution showed non-monotonic variation with annealing temperature and a CL quenching occurring at 1000 • C. The CL signal evolution as a function of the annealing treatment is discussed regarding to the evolution of structural properties.
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