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B. Agache, D. Legrand, L. Collard, and H. Buchaillot, Fabrication and characterization of 1.1GHz blade nanoelectromechanical resonator, Applied Physics Letters, vol.86, issue.21, pp.213104-213105, 2005.
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R. Agache, P. Ringot, V. Bigotte, B. Senez, L. Legrand et al., Modeling and Experimental Validation of Sharpening Mechanism Based on Thermal Oxidation for Fabrication of Ultra-Sharp Silicon Nanotips, IEEE Transactions On Nanotechnology, vol.4, issue.5, pp.5-548, 2005.
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M. , M. , B. Legrand, A. E. Ashcroft, L. Buchaillot et al., Towards mechanical characterization of biomolecules by MNEMS tools D, SOI-based nanoelectrospray emitter tips for mass spectrometry: a coupled31) A silicon beam-based microcantilever nanoelectrosprayer S. Arscott, B. Legrand, L. Buchaillot and A.E. Ashcroft Sensors and Actuators B-Chem, pp.509-514, 2007.

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B. Ataka, L. Legrand, D. Buchaillot, H. Collard, and I. Fujita, Design, Fabrication, and Operation of Two-Dimensional Conveyance System With Ciliary Actuator Arrays, IEEE/ASME Transactions on Mechatronics, vol.14, issue.1, pp.119-125, 2009.
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D. Galayko, A. Kaiser, B. Legrand, D. Collard, L. Buchaillot et al., micro-mechanical resonators in thick epipoly technology with post-process gap adjustment, Combi Proceedings of the 15 th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002, pp.665-668, 2002.
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D. Galayko, A. Kaiser, B. Legrand, and O. , Architecture-level center frequency drift compensation method for micro-mechanical filters used in IF stages of wireless telecommunication receivers, Billoint Proceedings of the SPIE Conference on Design, Test, Integration, and Packaging of MEMS/MOEMS DTIP 2002, pp.6-8, 2002.
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M. Agache, P. Bigotte, B. Legrand, V. Senez, L. Buchaillot et al., Actuators and Microsystems TRANSDUCERS'03) Modeling of failure mechanisms for optimized MEMS CAD: Design, fabrication and characterization of in situ test benches O. Millet, Collard Proceedings of the 12 th International Conference on Solid-State Sensors Agache, B. Legrand, D. Collard and L. Buchaillot Proceedings of the 12 th International Conference on Solid-State Sensors, Actuators and Microsystems TRANSDUCERS'03, pp.8-12, 1287.

E. Quévy, B. Legrand, D. Collard, and L. , Tapping-mode HF nanometric lateral gap resonators: experimental and theory, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), pp.8-12, 2003.
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D. Galayko, A. Kaiser, B. Legrand, L. Buchaillot, D. Collard et al., Microelectromechanical coupled resonsator IF filters with variable bandwidth in thick-film epitaxial polysilicon technology, Combi Proceedings of the 4 th Workshop on MEMS for Millimeterwave Communications MEMSWAVE 2003, pp.23-26, 2003.
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D. H. Cho, L. Collard, B. Buchaillot, B. J. Legrand, and . Kim, Characterization of individual bio-cells with thermally actuated probe arrays Y, Proceedings of the SPIE Conference on Design, Test, Integration, and Packaging of MEMS/MOEMS DTIP 2004, pp.12-14, 2004.

O. Millet, P. Bertrand, B. Legrand, D. Collard, and L. , Reliability of polycrystalline MEMS: prediction of the debugging-time, Buchaillot Proceedings of the 30 th International Symposium for Testing and Failure Analysis ISTFA 2004, pp.14-18, 2004.
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O. Millet, P. Bertrand, B. Legrand, D. Collard, and L. , An original methodology to assess fatigue behavior in RF MEMS devices, Buchaillot Proceedings of the 34 th European Microwave Conference EuMC, pp.12-14, 2004.
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B. Agache, D. Legrand, H. Collard, and L. Fujita, 1.1 GHz silicon blade nano-electromechanical resonator featuring 20 nm gap lateral transducers, 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005., pp.121-124, 2005.
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O. Millet, O. Blanrue, B. Legrand, D. Collard, and L. , MEMS reliability: metrology set-up for investigation of fatigue causes, Buchaillot Proceedings of the 18 th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2005, Miami Beach FL (USA), pp.483-486, 2005.
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B. Agache, K. Legrand, H. Nakamura, L. Kawakatsu, H. Buchaillot et al., Characterization of vertical vibration of electrostatically actuated resonators using atomic force microscope in noncontact mode, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., pp.2023-2026, 2005.
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O. Millet, P. Muller, O. Blanrue, B. Legrand, D. Collard et al., Reliability of non-released microstructures: failure analysis and innovative solution process, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., pp.840-842, 2005.
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B. S. Rollier, D. Legrand, M. Deresmes, D. Lagouge, and L. Collard, Tensile stress determination in silicon nitride membrane by AFM characterization, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., pp.828-831, 2005.
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B. Agache, D. Legrand, H. Collard, and L. Fujita, Test, Integration, and Packaging of MEMS (32) Micromachined actuators for friction driven linear micro-motors B, Buchaillot Proceedings of the SPIE Conference on Design Legrand, L. Buchaillot and D. Collard Proceedings of the 5 th International Symposium on Linear Drive for Industry Applications LDIA 2005, pp.26-31, 2005.

B. Legrand, A. S. Rollier, L. Buchaillot, and D. , Parallel Plate Electrostatic Actuators in Liquids: Displacement-Voltage Optimisation for Microfluidic Applications, 19th IEEE International Conference on Micro Electro Mechanical Systems, pp.718-721, 2006.
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M. S. Rollier, B. Faucher, D. Legrand, and L. Collard, Electrostatic actuators operating in liquid environment: suppression of pull in instability and dynamic response A, Buchaillot Proceedings of the SPIE Conference on Design, Test, Integration, and Packaging of MEMS/MOEMS DTIP 2006, pp.244-249, 2006.

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J. B. Bureau, B. Legrand, D. Collard, and L. , Compact multilayer piezoresistive gauge for in-plane strain measurement in liquids, Buchaillot Proceedings of the 14 th International Conference on Solid-State Sensors, Actuators and Microsystems TRANSDUCERS'07, pp.10-14, 2007.
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F. Durand, B. Casset, M. Legrand, P. Faucher, D. Renaux et al., Characterization of IN-IC integrable in-plane nanometer scale resonators fabricated by a silicon on nothing advanced CMOS technology, 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems, pp.13-17, 2008.
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E. Algré, B. Legrand, M. Faucher, B. Walter, and L. , Tip-matter interaction measurements using mems ring resonators, TRANSDUCERS 2009, 2009 International Solid-State Sensors, Actuators and Microsystems Conference, pp.1638-1641, 2009.
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B. Xiong, E. Walter, M. Mairiaux, L. Faucher, and B. Buchaillot, Conception and Fabrication of Silicon Ring Resonator With Piezo-Resistive Detection for Force Sensing Applications, Volume 11: Nano and Micro Materials, Devices and Systems; Microsystems Integration, pp.11-17, 2011.
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B. Xiong, E. Walter, M. Mairiaux, L. Faucher, and B. Buchaillot, Conception and fabrication of piezo-resistive ring-shaped AFM probes, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS), pp.547-550, 2012.
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L. Buchaillot, B. Legrand, M. Faucher, B. Walter, M. Faucher et al., 12 years of resonator: From telephone to atomic force microscopy, 2011 International Symposium on Micro-NanoMechatronics and Human Science, pp.6-9, 2011.
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