@phdthesis{ivan:tel-00803165, TITLE = {{R{\'e}sonateurs {\`a} haute fr{\'e}quence {\`a} ondes de volume en r{\'e}alisatin MEMS sur tranche silicium}}, AUTHOR = {Ivan, Michaela}, URL = {https://theses.hal.science/tel-00803165}, HAL_LOCAL_REFERENCE = {D{\'e}partement TEMPS FREQUENCE}, SCHOOL = {{Universit{\'e} de Franche-Comt{\'e}}}, YEAR = {2012}, MONTH = Dec, KEYWORDS = {MEMS ; bulk acoustic wave resonator ; electrostatic actuation ; thickness-extensional mode ; flexural mode ; energy trapping ; oscillator ; sensor ; r{\'e}sonateur {\`a} onde de volume ; excitation {\'e}lectrostatique ; mode d'extension compression ; mode de flexion ; confinement de l'{\'e}nergie ; oscillateur ; capteur}, TYPE = {Theses}, PDF = {https://theses.hal.science/tel-00803165/file/corpul_tezei-completv9.9.pdf}, HAL_ID = {tel-00803165}, HAL_VERSION = {v1}, }