@phdthesis{xu:tel-00830893, TITLE = {{Conception et r{\'e}alisation d'un interf{\'e}rom{\`e}tre polarim{\'e}trique : application {\`a} la nanom{\'e}trologie dimensionnelle}}, AUTHOR = {Xu, Suan}, URL = {https://theses.hal.science/tel-00830893}, SCHOOL = {{Universit{\'e} de Versailles-Saint Quentin en Yvelines}}, YEAR = {2009}, MONTH = Jan, KEYWORDS = {Dimensional nanometrology ; Polarimetric interferometer ; Phase lock-in ; Sources of error. ; Nanom{\'e}trologie dimensionnelle ; Interf{\'e}rom{\`e}tre polarim{\'e}trique ; Asservissements de phase ; Sources d'erreurs}, TYPE = {Theses}, PDF = {https://theses.hal.science/tel-00830893/file/ThA_se_Suan_final_version.pdf}, HAL_ID = {tel-00830893}, HAL_VERSION = {v1}, }