Piezoelectric systems for precise and high dynamic positioning: design, modeling, estimation and control
Résumé
This HDR synthesizes the works I have carried out at the department of AS2M of the FEMTO-ST
Institute as well as the different administrative, editorial and teaching activities. The research works
(supervised, in collaboration, ...) deal with the: design, development, modeling, control and signals
measurement and estimation in piezoelectric based systems devoted to precise and highly dynamic
positioning applications. The systems behaviors include linear and nonlinear phenomena (hysteresis
and creep) and badly damped vibrations which greatly compromise the performances of the
positioning tasks, and which pose great challenge in their control. The proposed control techniques
enclose feedforward and feedback schemes. In feedback schemes, mainly robust techniques are
studied: H-infinity techniques and interval control techniques. In the use of intervals, new theoretical
results are also proposed and are applied to different applications: design, control, structural
analysis. Innovative measurement techniques have also been proposed to estimate the signals in
piezoelectric systems by accounting for the limited space, the high dynamics and the high precision
requirements. The last part of the HDR poses questions and wonders if these different developments
and endeavors would not be profitable for the development of other applications than precise and
highly dynamic positioning.
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