@phdthesis{dekkar:tel-03342582, TITLE = {{Films de diamant nanocristallin synth{\'e}tis{\'e}s {\`a} tr{\`e}s basse temp{\'e}rature par plasma micro-onde distribu{\'e} : du proc{\'e}d{\'e} de croissance aux applications}}, AUTHOR = {Dekkar, Damia}, URL = {https://theses.hal.science/tel-03342582}, NUMBER = {2020PA131006}, SCHOOL = {{Universit{\'e} Paris-Nord - Paris XIII}}, YEAR = {2020}, MONTH = Nov, KEYWORDS = {Diamond ; Thin films ; Chemical vapor deposition ; Diamant ; Films minces ; D{\'e}p{\^o}t chimique en phase vapeur}, TYPE = {Theses}, PDF = {https://theses.hal.science/tel-03342582/file/edgalilee_th_2020_dekkar.pdf}, HAL_ID = {tel-03342582}, HAL_VERSION = {v1}, }