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Habilitation à diriger des recherches

CONTRIBUTION AU DOMAINE DES ACTIONNEURS ET RÉSONATEURS MICRO-‐ÉLECTROMÉCANIQUES. APPLICATIONS À LA NANO­‐CARACTÉRISATION.

Bernard Louis Amand Legrand 1 
1 NAM6 - IEMN - Nano and Microsystems - IEMN
IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
Abstract : My research activities have covered since 1996 the fields of nanosciences, semi-conductor physics, micro and nanotechnologies and MEMS/NEMS (Micro/NanoElectroMechanical Systems). In particular, I joined the Silicon Microsystems department of IEMN in October 2000 and I worked on electromechanical microresonators for applications in signal processing, both in the IF and RF frequency ranges. I was leading the development of the electrical characterization techniques and strongly involved in the modelling of the microresonators. Since 2002, I have extended my research activities in the MEMS area from microresonators to actuators and sensors, with applications towards nanotechnology and biology. I have put my efforts on the development of electrostatic actuators for operation in a liquid environment and on capacitive and piezoresistive sensors with ultimate performances for applications at the nanometer scale. Since 2007, I have been mainly working on MEMS resonators as probes for Atomic Force Microscopy, that is to say as high sensitivity force sensors. This research activity is currently funded by the European Research Council (ERC) in the framework of a Starting Grant I received in 2007 (SMART project). In 2009, we demonstrated for the first time AFM imaging using this new generation of MEMS-based AFM probes, and in 2010 we obtained images of DNA origamis at a rate of 1 fps. The research work is now focussed on MEMS probe downscaling for better performances, AFM imaging in liquids and, high speed AFM acquisition using these devices. This work paves the way for the use of micro and nanosystems as tools for enhanced characterization of nanoobjects.
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Habilitation à diriger des recherches
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Submitted on : Monday, June 11, 2012 - 4:10:44 PM
Last modification on : Tuesday, December 6, 2022 - 12:42:13 PM
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  • HAL Id : tel-00706851, version 1

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Bernard Louis Amand Legrand. CONTRIBUTION AU DOMAINE DES ACTIONNEURS ET RÉSONATEURS MICRO-‐ÉLECTROMÉCANIQUES. APPLICATIONS À LA NANO­‐CARACTÉRISATION.. Micro et nanotechnologies/Microélectronique. Université des Sciences et Technologie de Lille - Lille I, 2012. ⟨tel-00706851⟩

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