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Conception et réalisation de micro-capteurs de pression pour l’instrumentation d’interface à retour d’effort

Abstract : This PhD work presents the design and realization of a 3D flexible force sensor that can be integrated in surgical gloves or tools to qualify and quantify the grip forces including normal and shear stress. A state of the art first presents the suitable technologies for this application. Then, the choice is focused on the design and dimensioning, using Hooke’s law, of a capacitive tri-axis sensor of 8 x 8 x 3 cells/cm² matrix from a flexible dielectric of low Young’s modulus around 1 MPa. Designed cells have a nearby nominal capacitance of 0.5 pF. A variation of 30% is expected at maximum force range of 100 N/cm². The aimed dynamic is 1 to 1000. It corresponds to a resolution of 0.15 fF or 100 mN/cm². The flexible sensor fabrication is tackled by taking into account the characterization of support materials, notably the Kapton, in a stream of microfabrication. Metallization and adhesion of electrodes on PDMS problems lead to the development of a process based on film transfer technology adapted to electrodes buried in PDMS. On the basis of ANSYS simulations, the operating physical principle is validated. They are confirmed by static and in charge electrical measurements of the tactile sensor for forces ranging from 10 mN to 20 N.
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Submitted on : Friday, July 13, 2012 - 3:27:44 PM
Last modification on : Friday, October 23, 2020 - 4:52:25 PM
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  • HAL Id : tel-00717751, version 1

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Sébastien Nazeer. Conception et réalisation de micro-capteurs de pression pour l’instrumentation d’interface à retour d’effort. Autre [cond-mat.other]. Université Paris Sud - Paris XI, 2012. Français. ⟨NNT : 2012PA112140⟩. ⟨tel-00717751⟩

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